| Model | EJW-300F-GNC (ENGIS JAPAN ) |
|---|---|
| surface plate size | φ3200mm |
| Features |
| Model | LP-15 (Lapmaster Japan) |
|---|---|
| surface plate size | LP-15 (Lapmaster Japan) |
| surface plate size | LP-15 (Lapmaster Japan) |
| Features |
| Model | GRIND-X SPP1000S (Okamoto Machine Tool Works) |
|---|---|
| surface plate size | φ1000mm |
| Features |
| Model | Q-flex300 (QED Technologies） |
|---|---|
| surface plate size | φ300mm |
| Features | Ultra precision freeform polishing machine using MagnetoRheological Finishing. |
| mass flow controller(MFC) / vacuum plate | |
| LCD・Film・Battery field | die / nozzle / vacuum table / large table for inspection / light guide plate |
| Optical field | special prism |
| others | substrate for growing single crytal(polycrystal) film / mirror surface piece / stage / table / capillary |
| Single crytal | ＮａＣｌ / ＫＢｒ / ＫＣｌ / ＣｓＩ / ＣｓＢｒ / ＡｇＣｌ / ＡｇＢｒ / ＺｎＳ / ＭｇＦ２ / ＣａＦ２ / ＢａＦ２ / ＬｉＦ / Ａｌ２Ｏ３ / ＳｉＯ２ / Ｓｉ / Ｇｅ / ＳｉＣ / oxide single crystal / metal single crystal |
|---|---|
| METAL | SUS (stainless steel) / Al (aluminum) / Cu (copper) / Ti (titanium) / Mo (molybdenum) / W (tungsten) / Ni (nickel) / Inconel / HASTELLOY / Permalloy / Invar / White metal / Cemented Carbide / Cemented Carbide+SUS (grinding two surfaces at the same time) |
| nonmetal | Ceramics：SiC(Silicon Carbide) 、Alumina、Zirconia、YAG Carbon Stone Zerodur Glass：Quartz(SiO2)、BK７、blue-board glass、white-board glass、borosilicate glass、others Resin：Acrylic resin、PEEK、PVC(polyvinyl chloride) 、MC Nylon、Teflon、polyimide resin CFRP(carbon-fiber- reinforced plastic) |
| surface- plating layer | plating layer：alumite、Ni(nickel plating )、Ni-P(electroless nickel phosphorous plating) |
