PRODUCT MACHINING RESULTS

PRODUCT MACHINING RESULTS

Double-side polishing of large LBO single crystal substrate. (100x100x1.5mm)
We succeeded in polishing the largest LBO single crystal substrate in the world for LFEX(Laser for Fast Ignition Experiment).
The GEKKO XII Laser is one of the world’s few large­scale laser facilities whish is in Institute of Laser Engineering, Osaka University.
(co­developed with Dr.Yasunobu Arikawa, Assistant Professor in Institute of Laser Engineering, Osaka University)
 GEKKOⅫ                                        SorceInstitute of Laser Engineering, Osaka University
 
 

Processing Accuracy

We achieved excellent polishing accuracy of which transmitted wavefront irregularity was 0.26 micrometre.

         

 Form accuracy : PV0.26μm                 Surface roughness:Sa0.44nm   
 Mesurement instrument  Zygo Verifire ATZ   
Mesurement instrument  :Zygo NewView 8300

 

 

  

   Size:100x100x1.5mm

 

 

 

【 Mesurement instrument 】

Large Aperture Interferometer System 
Machine : Verifire ATZ  (Zygo)

Measuring range :φ300mm

  Iinformation

   https://www.crystal­opt.co.jp/contents/works/machinery/Verifireatz.php

 

 

 

 3D Optical Surface Profilers                                Machine : New View8300  (Zygo)
 
Magnification : x1.375~x100:(6x6mm)/(0.08x0.08mm)

 

 

 

【Information】

Single crystal polishing technique                                https://www.crystal­opt.co.jp/contents/works/facts/index.php mode=result&seq=9

 

 

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